TY  - BOOK
AU  - Beeby,Stephen
AU  - Ensell,Graham
AU  - Kraft,Michael
AU  - White,Neil
TI  - MEMS mechanical sensors
SN  - 1580535364
U1  - 681.2 
PY  - 2004///
CY  - Boston
PB  - Artech House
KW  - Microelectromechanical systems
KW  - Detectors
UR  - http://www.loc.gov/catdir/toc/fy0611/2004046158.html
ER  -